1/3/2013	8:28:11 AM	Recipe started at 8:28 AM
1/3/2013	8:28:11 AM	Helium valve closed
1/3/2013	8:28:11 AM	H2 valve closed
1/3/2013	8:28:11 AM	BCl3 valve closed
1/3/2013	8:28:11 AM	PH3 valve closed
1/3/2013	8:28:11 AM	SiCl4 pre valve closed
1/3/2013	8:28:11 AM	SiCl4 post valve closed
1/3/2013	8:28:11 AM	Bypass valve closed
1/3/2013	8:28:11 AM	Bubbler valve closed
1/3/2013	8:28:11 AM	Main Vac valve opened
1/3/2013	8:28:11 AM	Helium MFC set to  0.000000
1/3/2013	8:28:11 AM	H2 MFC set to  0.000000
1/3/2013	8:28:11 AM	BCl3 MFC set to  0.000000
1/3/2013	8:28:11 AM	PH3 MFC set to  0.000000
1/3/2013	8:28:11 AM	SiCl4 MFC set to  0.000000
1/3/2013	8:28:11 AM	Bypass solenoid MFC set to  0.000000
1/3/2013	8:28:11 AM	Tube furnace set to 150
1/3/2013	8:28:41 AM	H2 valve closed
1/3/2013	8:28:41 AM	BCl3 valve closed
1/3/2013	8:28:41 AM	PH3 valve closed
1/3/2013	8:28:41 AM	SiCl4 pre valve closed
1/3/2013	8:28:41 AM	SiCl4 post valve closed
1/3/2013	8:28:41 AM	Bypass valve closed
1/3/2013	8:28:41 AM	Bubbler valve closed
1/3/2013	8:28:41 AM	Helium valve opened
1/3/2013	8:28:41 AM	Main Vac valve opened
1/3/2013	8:28:41 AM	Helium MFC set to  20.000000
1/3/2013	8:28:41 AM	H2 MFC set to  0.000000
1/3/2013	8:28:41 AM	BCl3 MFC set to  0.000000
1/3/2013	8:28:41 AM	PH3 MFC set to  0.000000
1/3/2013	8:28:41 AM	SiCl4 MFC set to  0.000000
1/3/2013	8:28:41 AM	Bypass solenoid MFC set to  0.000000
1/3/2013	8:28:41 AM	Tube furnace set to 150
1/3/2013	8:28:50 AM	Helium valve closed
1/3/2013	8:28:50 AM	H2 valve closed
1/3/2013	8:28:50 AM	BCl3 valve closed
1/3/2013	8:28:50 AM	PH3 valve closed
1/3/2013	8:28:50 AM	SiCl4 pre valve closed
1/3/2013	8:28:50 AM	SiCl4 post valve closed
1/3/2013	8:28:50 AM	Bypass valve closed
1/3/2013	8:28:50 AM	Bubbler valve closed
1/3/2013	8:28:50 AM	Main Vac valve opened
1/3/2013	8:28:50 AM	Helium MFC set to  0.000000
1/3/2013	8:28:50 AM	H2 MFC set to  0.000000
1/3/2013	8:28:50 AM	BCl3 MFC set to  0.000000
1/3/2013	8:28:50 AM	PH3 MFC set to  0.000000
1/3/2013	8:28:50 AM	SiCl4 MFC set to  0.000000
1/3/2013	8:28:50 AM	Bypass solenoid MFC set to  0.000000
1/3/2013	8:28:51 AM	Tube furnace set to 150
1/3/2013	8:29:13 AM	H2 valve closed
1/3/2013	8:29:13 AM	BCl3 valve closed
1/3/2013	8:29:13 AM	PH3 valve closed
1/3/2013	8:29:13 AM	SiCl4 pre valve closed
1/3/2013	8:29:13 AM	SiCl4 post valve closed
1/3/2013	8:29:13 AM	Bypass valve closed
1/3/2013	8:29:13 AM	Bubbler valve closed
1/3/2013	8:29:13 AM	Helium valve opened
1/3/2013	8:29:13 AM	Main Vac valve opened
1/3/2013	8:29:13 AM	Helium MFC set to  20.000000
1/3/2013	8:29:13 AM	H2 MFC set to  0.000000
1/3/2013	8:29:13 AM	BCl3 MFC set to  0.000000
1/3/2013	8:29:13 AM	PH3 MFC set to  0.000000
1/3/2013	8:29:13 AM	SiCl4 MFC set to  0.000000
1/3/2013	8:29:13 AM	Bypass solenoid MFC set to  0.000000
1/3/2013	8:29:13 AM	Tube furnace set to 150
1/3/2013	8:29:29 AM	Helium valve closed
1/3/2013	8:29:29 AM	H2 valve closed
1/3/2013	8:29:29 AM	BCl3 valve closed
1/3/2013	8:29:29 AM	PH3 valve closed
1/3/2013	8:29:29 AM	SiCl4 pre valve closed
1/3/2013	8:29:29 AM	SiCl4 post valve closed
1/3/2013	8:29:29 AM	Bypass valve closed
1/3/2013	8:29:29 AM	Bubbler valve closed
1/3/2013	8:29:29 AM	Main Vac valve opened
1/3/2013	8:29:29 AM	Helium MFC set to  0.000000
1/3/2013	8:29:29 AM	H2 MFC set to  0.000000
1/3/2013	8:29:29 AM	BCl3 MFC set to  0.000000
1/3/2013	8:29:29 AM	PH3 MFC set to  0.000000
1/3/2013	8:29:29 AM	SiCl4 MFC set to  0.000000
1/3/2013	8:29:29 AM	Bypass solenoid MFC set to  0.000000
1/3/2013	8:29:29 AM	Tube furnace set to 150
1/3/2013	8:29:50 AM	Run aborted at 8:29 AM
1/3/2013	8:29:50 AM	Helium valve closed
1/3/2013	8:29:50 AM	H2 valve closed
1/3/2013	8:29:50 AM	BCl3 valve closed
1/3/2013	8:29:50 AM	PH3 valve closed
1/3/2013	8:29:50 AM	SiCl4 pre valve closed
1/3/2013	8:29:50 AM	SiCl4 post valve closed
1/3/2013	8:29:50 AM	Bypass valve closed
1/3/2013	8:29:50 AM	Main Vac valve closed
1/3/2013	8:29:50 AM	Bubbler valve closed
1/3/2013	8:29:50 AM	Helium MFC set to  0.000000
1/3/2013	8:29:50 AM	H2 MFC set to  0.000000
1/3/2013	8:29:50 AM	BCl3 MFC set to  0.000000
1/3/2013	8:29:50 AM	PH3 MFC set to  0.000000
1/3/2013	8:29:50 AM	SiCl4 MFC set to  0.000000
1/3/2013	8:29:50 AM	Tube furnace set to 0
1/3/2013	8:29:51 AM	Main Vac valve opened
1/3/2013	8:30:22 AM	Recipe started at 8:30 AM
1/3/2013	8:30:22 AM	Helium valve closed
1/3/2013	8:30:22 AM	H2 valve closed
1/3/2013	8:30:22 AM	BCl3 valve closed
1/3/2013	8:30:22 AM	PH3 valve closed
1/3/2013	8:30:22 AM	SiCl4 pre valve closed
1/3/2013	8:30:22 AM	SiCl4 post valve closed
1/3/2013	8:30:22 AM	Main Vac valve closed
1/3/2013	8:30:22 AM	Bypass valve closed
1/3/2013	8:30:22 AM	Bubbler valve closed
1/3/2013	8:30:22 AM	Helium MFC set to  0.000000
1/3/2013	8:30:22 AM	H2 MFC set to  0.000000
1/3/2013	8:30:22 AM	BCl3 MFC set to  0.000000
1/3/2013	8:30:22 AM	PH3 MFC set to  0.000000
1/3/2013	8:30:22 AM	SiCl4 MFC set to  0.000000
1/3/2013	8:30:22 AM	Bypass solenoid MFC set to  0.000000
1/3/2013	8:30:22 AM	Tube furnace set to 0
1/3/2013	8:30:26 AM	Helium valve closed
1/3/2013	8:30:26 AM	BCl3 valve closed
1/3/2013	8:30:26 AM	PH3 valve closed
1/3/2013	8:30:26 AM	SiCl4 pre valve closed
1/3/2013	8:30:26 AM	SiCl4 post valve closed
1/3/2013	8:30:26 AM	Main Vac valve closed
1/3/2013	8:30:26 AM	Bypass valve closed
1/3/2013	8:30:26 AM	Bubbler valve closed
1/3/2013	8:30:26 AM	H2 valve opened
1/3/2013	8:30:26 AM	Helium MFC set to  0.000000
1/3/2013	8:30:26 AM	H2 MFC set to  500.000000
1/3/2013	8:30:26 AM	BCl3 MFC set to  0.000000
1/3/2013	8:30:26 AM	PH3 MFC set to  0.000000
1/3/2013	8:30:26 AM	SiCl4 MFC set to  0.000000
1/3/2013	8:30:26 AM	Bypass solenoid MFC set to  0.000000
1/3/2013	8:30:26 AM	Tube furnace set to 0
1/3/2013	8:31:37 AM	Helium valve closed
1/3/2013	8:31:37 AM	BCl3 valve closed
1/3/2013	8:31:37 AM	PH3 valve closed
1/3/2013	8:31:37 AM	SiCl4 pre valve closed
1/3/2013	8:31:37 AM	SiCl4 post valve closed
1/3/2013	8:31:37 AM	Main Vac valve closed
1/3/2013	8:31:37 AM	Bypass valve closed
1/3/2013	8:31:37 AM	H2 valve opened
1/3/2013	8:31:37 AM	Bubbler valve opened
1/3/2013	8:31:37 AM	Helium MFC set to  0.000000
1/3/2013	8:31:37 AM	H2 MFC set to  500.000000
1/3/2013	8:31:37 AM	BCl3 MFC set to  0.000000
1/3/2013	8:31:37 AM	PH3 MFC set to  0.000000
1/3/2013	8:31:37 AM	SiCl4 MFC set to  0.000000
1/3/2013	8:31:37 AM	Bypass solenoid MFC set to  0.000000
1/3/2013	8:31:37 AM	Tube furnace set to 0
1/3/2013	8:31:38 AM	Helium valve closed
1/3/2013	8:31:38 AM	BCl3 valve closed
1/3/2013	8:31:38 AM	PH3 valve closed
1/3/2013	8:31:38 AM	SiCl4 pre valve closed
1/3/2013	8:31:38 AM	SiCl4 post valve closed
1/3/2013	8:31:38 AM	Main Vac valve closed
1/3/2013	8:31:38 AM	Bypass valve closed
1/3/2013	8:31:38 AM	H2 valve opened
1/3/2013	8:31:38 AM	Bubbler valve opened
1/3/2013	8:31:38 AM	Helium MFC set to  0.000000
1/3/2013	8:31:38 AM	H2 MFC set to  500.000000
1/3/2013	8:31:38 AM	BCl3 MFC set to  0.000000
1/3/2013	8:31:38 AM	PH3 MFC set to  0.000000
1/3/2013	8:31:38 AM	SiCl4 MFC set to  0.000000
1/3/2013	8:31:38 AM	Bypass solenoid MFC set to  0.000000
1/3/2013	8:31:38 AM	Tube furnace set to 1000
1/3/2013	8:51:38 AM	Helium valve closed
1/3/2013	8:51:38 AM	PH3 valve closed
1/3/2013	8:51:38 AM	Main Vac valve closed
1/3/2013	8:51:38 AM	Bypass valve closed
1/3/2013	8:51:38 AM	H2 valve opened
1/3/2013	8:51:38 AM	BCl3 valve opened
1/3/2013	8:51:38 AM	SiCl4 pre valve opened
1/3/2013	8:51:38 AM	SiCl4 post valve opened
1/3/2013	8:51:38 AM	Bubbler valve opened
1/3/2013	8:51:38 AM	Helium MFC set to  0.000000
1/3/2013	8:51:38 AM	H2 MFC set to  450.000000
1/3/2013	8:51:38 AM	BCl3 MFC set to  1.500000
1/3/2013	8:51:38 AM	PH3 MFC set to  0.000000
1/3/2013	8:51:38 AM	SiCl4 MFC set to  50.000000
1/3/2013	8:51:38 AM	Bypass solenoid MFC set to  0.000000
1/3/2013	8:51:38 AM	Tube furnace set to 1000
1/3/2013	9:11:38 AM	Helium valve closed
1/3/2013	9:11:38 AM	BCl3 valve closed
1/3/2013	9:11:38 AM	Main Vac valve closed
1/3/2013	9:11:38 AM	Bypass valve closed
1/3/2013	9:11:38 AM	H2 valve opened
1/3/2013	9:11:38 AM	PH3 valve opened
1/3/2013	9:11:38 AM	SiCl4 pre valve opened
1/3/2013	9:11:38 AM	SiCl4 post valve opened
1/3/2013	9:11:38 AM	Bubbler valve opened
1/3/2013	9:11:38 AM	Helium MFC set to  0.000000
1/3/2013	9:11:38 AM	H2 MFC set to  450.000000
1/3/2013	9:11:38 AM	BCl3 MFC set to  0.000000
1/3/2013	9:11:38 AM	PH3 MFC set to  20.000000
1/3/2013	9:11:38 AM	SiCl4 MFC set to  50.000000
1/3/2013	9:11:38 AM	Bypass solenoid MFC set to  0.000000
1/3/2013	9:11:39 AM	Tube furnace set to 1000
1/3/2013	9:16:39 AM	Helium valve closed
1/3/2013	9:16:39 AM	BCl3 valve closed
1/3/2013	9:16:39 AM	PH3 valve closed
1/3/2013	9:16:39 AM	SiCl4 pre valve closed
1/3/2013	9:16:39 AM	SiCl4 post valve closed
1/3/2013	9:16:39 AM	Main Vac valve closed
1/3/2013	9:16:39 AM	Bypass valve closed
1/3/2013	9:16:39 AM	H2 valve opened
1/3/2013	9:16:39 AM	Bubbler valve opened
1/3/2013	9:16:39 AM	Helium MFC set to  0.000000
1/3/2013	9:16:39 AM	H2 MFC set to  500.000000
1/3/2013	9:16:39 AM	BCl3 MFC set to  0.000000
1/3/2013	9:16:39 AM	PH3 MFC set to  0.000000
1/3/2013	9:16:39 AM	SiCl4 MFC set to  0.000000
1/3/2013	9:16:39 AM	Bypass solenoid MFC set to  0.000000
1/3/2013	9:16:39 AM	Tube furnace set to 950
1/3/2013	9:19:39 AM	Helium valve closed
1/3/2013	9:19:39 AM	BCl3 valve closed
1/3/2013	9:19:39 AM	PH3 valve closed
1/3/2013	9:19:39 AM	SiCl4 pre valve closed
1/3/2013	9:19:39 AM	SiCl4 post valve closed
1/3/2013	9:19:39 AM	Main Vac valve closed
1/3/2013	9:19:39 AM	Bypass valve closed
1/3/2013	9:19:39 AM	H2 valve opened
1/3/2013	9:19:39 AM	Bubbler valve opened
1/3/2013	9:19:39 AM	Helium MFC set to  0.000000
1/3/2013	9:19:39 AM	H2 MFC set to  500.000000
1/3/2013	9:19:39 AM	BCl3 MFC set to  0.000000
1/3/2013	9:19:39 AM	PH3 MFC set to  0.000000
1/3/2013	9:19:39 AM	SiCl4 MFC set to  0.000000
1/3/2013	9:19:39 AM	Bypass solenoid MFC set to  0.000000
1/3/2013	9:19:39 AM	Tube furnace set to 900
1/3/2013	9:22:39 AM	Helium valve closed
1/3/2013	9:22:39 AM	BCl3 valve closed
1/3/2013	9:22:39 AM	PH3 valve closed
1/3/2013	9:22:39 AM	SiCl4 pre valve closed
1/3/2013	9:22:39 AM	SiCl4 post valve closed
1/3/2013	9:22:39 AM	Main Vac valve closed
1/3/2013	9:22:39 AM	Bypass valve closed
1/3/2013	9:22:39 AM	H2 valve opened
1/3/2013	9:22:39 AM	Bubbler valve opened
1/3/2013	9:22:39 AM	Helium MFC set to  0.000000
1/3/2013	9:22:39 AM	H2 MFC set to  500.000000
1/3/2013	9:22:39 AM	BCl3 MFC set to  0.000000
1/3/2013	9:22:39 AM	PH3 MFC set to  0.000000
1/3/2013	9:22:39 AM	SiCl4 MFC set to  0.000000
1/3/2013	9:22:39 AM	Bypass solenoid MFC set to  0.000000
1/3/2013	9:22:39 AM	Tube furnace set to 850
1/3/2013	9:25:39 AM	Helium valve closed
1/3/2013	9:25:39 AM	BCl3 valve closed
1/3/2013	9:25:39 AM	PH3 valve closed
1/3/2013	9:25:39 AM	SiCl4 pre valve closed
1/3/2013	9:25:39 AM	SiCl4 post valve closed
1/3/2013	9:25:39 AM	Main Vac valve closed
1/3/2013	9:25:39 AM	Bypass valve closed
1/3/2013	9:25:39 AM	H2 valve opened
1/3/2013	9:25:39 AM	Bubbler valve opened
1/3/2013	9:25:39 AM	Helium MFC set to  0.000000
1/3/2013	9:25:39 AM	H2 MFC set to  500.000000
1/3/2013	9:25:39 AM	BCl3 MFC set to  0.000000
1/3/2013	9:25:39 AM	PH3 MFC set to  0.000000
1/3/2013	9:25:39 AM	SiCl4 MFC set to  0.000000
1/3/2013	9:25:39 AM	Bypass solenoid MFC set to  0.000000
1/3/2013	9:25:39 AM	Tube furnace set to 800
1/3/2013	9:28:40 AM	Helium valve closed
1/3/2013	9:28:40 AM	BCl3 valve closed
1/3/2013	9:28:40 AM	PH3 valve closed
1/3/2013	9:28:40 AM	SiCl4 pre valve closed
1/3/2013	9:28:40 AM	SiCl4 post valve closed
1/3/2013	9:28:40 AM	Main Vac valve closed
1/3/2013	9:28:40 AM	Bypass valve closed
1/3/2013	9:28:40 AM	H2 valve opened
1/3/2013	9:28:40 AM	Bubbler valve opened
1/3/2013	9:28:40 AM	Helium MFC set to  0.000000
1/3/2013	9:28:40 AM	H2 MFC set to  500.000000
1/3/2013	9:28:40 AM	BCl3 MFC set to  0.000000
1/3/2013	9:28:40 AM	PH3 MFC set to  0.000000
1/3/2013	9:28:40 AM	SiCl4 MFC set to  0.000000
1/3/2013	9:28:40 AM	Bypass solenoid MFC set to  0.000000
1/3/2013	9:28:40 AM	Tube furnace set to 750
1/3/2013	9:31:40 AM	H2 valve closed
1/3/2013	9:31:40 AM	BCl3 valve closed
1/3/2013	9:31:40 AM	PH3 valve closed
1/3/2013	9:31:40 AM	SiCl4 pre valve closed
1/3/2013	9:31:40 AM	SiCl4 post valve closed
1/3/2013	9:31:40 AM	Main Vac valve closed
1/3/2013	9:31:40 AM	Bypass valve closed
1/3/2013	9:31:40 AM	Helium valve opened
1/3/2013	9:31:40 AM	Bubbler valve opened
1/3/2013	9:31:40 AM	Helium MFC set to  500.000000
1/3/2013	9:31:40 AM	H2 MFC set to  0.000000
1/3/2013	9:31:40 AM	BCl3 MFC set to  0.000000
1/3/2013	9:31:40 AM	PH3 MFC set to  0.000000
1/3/2013	9:31:40 AM	SiCl4 MFC set to  0.000000
1/3/2013	9:31:40 AM	Bypass solenoid MFC set to  0.000000
1/3/2013	9:31:40 AM	Tube furnace set to 0
1/3/2013	9:51:40 AM	Helium valve closed
1/3/2013	9:51:40 AM	H2 valve closed
1/3/2013	9:51:40 AM	BCl3 valve closed
1/3/2013	9:51:40 AM	PH3 valve closed
1/3/2013	9:51:40 AM	SiCl4 pre valve closed
1/3/2013	9:51:40 AM	SiCl4 post valve closed
1/3/2013	9:51:40 AM	Main Vac valve closed
1/3/2013	9:51:40 AM	Bypass valve closed
1/3/2013	9:51:40 AM	Bubbler valve closed
1/3/2013	9:51:40 AM	Helium MFC set to  0.000000
1/3/2013	9:51:40 AM	H2 MFC set to  0.000000
1/3/2013	9:51:40 AM	BCl3 MFC set to  0.000000
1/3/2013	9:51:40 AM	PH3 MFC set to  0.000000
1/3/2013	9:51:40 AM	SiCl4 MFC set to  0.000000
1/3/2013	9:51:40 AM	Bypass solenoid MFC set to  0.000000
1/3/2013	9:51:40 AM	Tube furnace set to 0
1/3/2013	10:21:40 AM	Helium valve closed
1/3/2013	10:21:40 AM	H2 valve closed
1/3/2013	10:21:40 AM	BCl3 valve closed
1/3/2013	10:21:40 AM	PH3 valve closed
1/3/2013	10:21:40 AM	SiCl4 pre valve closed
1/3/2013	10:21:40 AM	SiCl4 post valve closed
1/3/2013	10:21:40 AM	Main Vac valve closed
1/3/2013	10:21:40 AM	Bubbler valve closed
1/3/2013	10:21:40 AM	Bypass valve opened
1/3/2013	10:21:40 AM	Helium MFC set to  0.000000
1/3/2013	10:21:40 AM	H2 MFC set to  0.000000
1/3/2013	10:21:40 AM	BCl3 MFC set to  0.000000
1/3/2013	10:21:40 AM	PH3 MFC set to  0.000000
1/3/2013	10:21:40 AM	SiCl4 MFC set to  0.000000
1/3/2013	10:21:40 AM	Bypass solenoid MFC set to  0.000000
1/3/2013	10:21:40 AM	Tube furnace set to 0
1/3/2013	10:22:39 AM	Helium valve closed
1/3/2013	10:22:39 AM	H2 valve closed
1/3/2013	10:22:39 AM	BCl3 valve closed
1/3/2013	10:22:39 AM	PH3 valve closed
1/3/2013	10:22:39 AM	SiCl4 pre valve closed
1/3/2013	10:22:39 AM	SiCl4 post valve closed
1/3/2013	10:22:39 AM	Main Vac valve closed
1/3/2013	10:22:39 AM	Bubbler valve closed
1/3/2013	10:22:39 AM	Bypass valve opened
1/3/2013	10:22:39 AM	Helium MFC set to  0.000000
1/3/2013	10:22:39 AM	H2 MFC set to  0.000000
1/3/2013	10:22:39 AM	BCl3 MFC set to  0.000000
1/3/2013	10:22:39 AM	PH3 MFC set to  0.000000
1/3/2013	10:22:39 AM	SiCl4 MFC set to  0.000000
1/3/2013	10:22:39 AM	Bypass solenoid MFC set to  0.000000
1/3/2013	10:22:39 AM	Tube furnace set to 0
1/3/2013	10:23:39 AM	Helium valve closed
1/3/2013	10:23:39 AM	H2 valve closed
1/3/2013	10:23:39 AM	BCl3 valve closed
1/3/2013	10:23:39 AM	PH3 valve closed
1/3/2013	10:23:39 AM	SiCl4 pre valve closed
1/3/2013	10:23:39 AM	SiCl4 post valve closed
1/3/2013	10:23:39 AM	Bypass valve closed
1/3/2013	10:23:39 AM	Bubbler valve closed
1/3/2013	10:23:39 AM	Main Vac valve opened
1/3/2013	10:23:39 AM	Helium MFC set to  0.000000
1/3/2013	10:23:39 AM	H2 MFC set to  0.000000
1/3/2013	10:23:39 AM	BCl3 MFC set to  0.000000
1/3/2013	10:23:39 AM	PH3 MFC set to  0.000000
1/3/2013	10:23:39 AM	SiCl4 MFC set to  0.000000
1/3/2013	10:23:39 AM	Bypass solenoid MFC set to  0.000000
1/3/2013	10:23:39 AM	Tube furnace set to 0
1/3/2013	10:23:40 AM	Run finished at 10:23 AM
1/3/2013	1:33:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/3/2013	1:33:34 PM	Recipe started at 1:33 PM
1/3/2013	1:33:34 PM	Helium valve closed
1/3/2013	1:33:34 PM	H2 valve closed
1/3/2013	1:33:34 PM	BCl3 valve closed
1/3/2013	1:33:34 PM	PH3 valve closed
1/3/2013	1:33:34 PM	SiCl4 pre valve closed
1/3/2013	1:33:34 PM	SiCl4 post valve closed
1/3/2013	1:33:34 PM	Main Vac valve closed
1/3/2013	1:33:34 PM	Bypass valve closed
1/3/2013	1:33:34 PM	Bubbler valve closed
1/3/2013	1:33:34 PM	Helium MFC set to  0.000000
1/3/2013	1:33:34 PM	H2 MFC set to  0.000000
1/3/2013	1:33:34 PM	BCl3 MFC set to  0.000000
1/3/2013	1:33:34 PM	PH3 MFC set to  0.000000
1/3/2013	1:33:34 PM	SiCl4 MFC set to  0.000000
1/3/2013	1:33:34 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	1:33:34 PM	Tube furnace set to 0
1/3/2013	1:33:37 PM	H2 valve closed
1/3/2013	1:33:37 PM	BCl3 valve closed
1/3/2013	1:33:37 PM	PH3 valve closed
1/3/2013	1:33:37 PM	SiCl4 pre valve closed
1/3/2013	1:33:37 PM	SiCl4 post valve closed
1/3/2013	1:33:37 PM	Main Vac valve closed
1/3/2013	1:33:37 PM	Bypass valve closed
1/3/2013	1:33:37 PM	Bubbler valve closed
1/3/2013	1:33:37 PM	Helium valve opened
1/3/2013	1:33:37 PM	Helium MFC set to  500.000000
1/3/2013	1:33:37 PM	H2 MFC set to  0.000000
1/3/2013	1:33:37 PM	BCl3 MFC set to  0.000000
1/3/2013	1:33:37 PM	PH3 MFC set to  0.000000
1/3/2013	1:33:37 PM	SiCl4 MFC set to  0.000000
1/3/2013	1:33:37 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	1:33:37 PM	Tube furnace set to 0
1/3/2013	1:34:49 PM	Helium valve closed
1/3/2013	1:34:49 PM	H2 valve closed
1/3/2013	1:34:49 PM	BCl3 valve closed
1/3/2013	1:34:49 PM	PH3 valve closed
1/3/2013	1:34:49 PM	SiCl4 pre valve closed
1/3/2013	1:34:49 PM	SiCl4 post valve closed
1/3/2013	1:34:49 PM	Main Vac valve closed
1/3/2013	1:34:49 PM	Bypass valve closed
1/3/2013	1:34:49 PM	Bubbler valve closed
1/3/2013	1:34:49 PM	Helium MFC set to  0.000000
1/3/2013	1:34:49 PM	H2 MFC set to  0.000000
1/3/2013	1:34:49 PM	BCl3 MFC set to  0.000000
1/3/2013	1:34:49 PM	PH3 MFC set to  0.000000
1/3/2013	1:34:49 PM	SiCl4 MFC set to  0.000000
1/3/2013	1:34:49 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	1:34:49 PM	Tube furnace set to 0
1/3/2013	1:34:50 PM	Run finished at 1:34 PM
1/3/2013	1:34:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/3/2013	2:04:51 PM	Bypass valve opened
1/3/2013	2:05:56 PM	Tube furnace set to 150
1/3/2013	2:06:46 PM	Main Vac valve opened
1/3/2013	2:06:46 PM	Bypass valve closed
1/3/2013	2:27:04 PM	Helium MFC set to  10.000000
1/3/2013	2:27:05 PM	Helium valve opened
1/3/2013	2:27:12 PM	Helium valve closed
1/3/2013	2:27:32 PM	Main Vac valve closed
1/3/2013	2:27:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/3/2013	2:27:42 PM	Recipe started at 2:27 PM
1/3/2013	2:27:42 PM	Helium valve closed
1/3/2013	2:27:42 PM	H2 valve closed
1/3/2013	2:27:42 PM	BCl3 valve closed
1/3/2013	2:27:42 PM	PH3 valve closed
1/3/2013	2:27:42 PM	SiCl4 pre valve closed
1/3/2013	2:27:42 PM	SiCl4 post valve closed
1/3/2013	2:27:42 PM	Main Vac valve closed
1/3/2013	2:27:42 PM	Bypass valve closed
1/3/2013	2:27:42 PM	Bubbler valve closed
1/3/2013	2:27:42 PM	Helium MFC set to  0.000000
1/3/2013	2:27:42 PM	H2 MFC set to  0.000000
1/3/2013	2:27:42 PM	BCl3 MFC set to  0.000000
1/3/2013	2:27:42 PM	PH3 MFC set to  0.000000
1/3/2013	2:27:42 PM	SiCl4 MFC set to  0.000000
1/3/2013	2:27:42 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	2:27:42 PM	Tube furnace set to 0
1/3/2013	2:27:45 PM	H2 valve closed
1/3/2013	2:27:45 PM	BCl3 valve closed
1/3/2013	2:27:45 PM	PH3 valve closed
1/3/2013	2:27:45 PM	SiCl4 pre valve closed
1/3/2013	2:27:45 PM	SiCl4 post valve closed
1/3/2013	2:27:45 PM	Main Vac valve closed
1/3/2013	2:27:45 PM	Bypass valve closed
1/3/2013	2:27:45 PM	Bubbler valve closed
1/3/2013	2:27:45 PM	Helium valve opened
1/3/2013	2:27:45 PM	Helium MFC set to  500.000000
1/3/2013	2:27:45 PM	H2 MFC set to  0.000000
1/3/2013	2:27:45 PM	BCl3 MFC set to  0.000000
1/3/2013	2:27:45 PM	PH3 MFC set to  0.000000
1/3/2013	2:27:45 PM	SiCl4 MFC set to  0.000000
1/3/2013	2:27:45 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	2:27:45 PM	Tube furnace set to 0
1/3/2013	2:28:55 PM	Helium valve closed
1/3/2013	2:28:55 PM	H2 valve closed
1/3/2013	2:28:55 PM	BCl3 valve closed
1/3/2013	2:28:55 PM	PH3 valve closed
1/3/2013	2:28:55 PM	SiCl4 pre valve closed
1/3/2013	2:28:55 PM	SiCl4 post valve closed
1/3/2013	2:28:55 PM	Main Vac valve closed
1/3/2013	2:28:55 PM	Bypass valve closed
1/3/2013	2:28:55 PM	Bubbler valve closed
1/3/2013	2:28:55 PM	Helium MFC set to  0.000000
1/3/2013	2:28:55 PM	H2 MFC set to  0.000000
1/3/2013	2:28:55 PM	BCl3 MFC set to  0.000000
1/3/2013	2:28:55 PM	PH3 MFC set to  0.000000
1/3/2013	2:28:55 PM	SiCl4 MFC set to  0.000000
1/3/2013	2:28:55 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	2:28:55 PM	Tube furnace set to 0
1/3/2013	2:28:56 PM	Run finished at 2:28 PM
1/3/2013	2:28:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/3/2013	2:31:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/3/2013	2:31:08 PM	Recipe started at 2:31 PM
1/3/2013	2:31:08 PM	Helium valve closed
1/3/2013	2:31:08 PM	H2 valve closed
1/3/2013	2:31:08 PM	BCl3 valve closed
1/3/2013	2:31:08 PM	PH3 valve closed
1/3/2013	2:31:08 PM	SiCl4 pre valve closed
1/3/2013	2:31:08 PM	SiCl4 post valve closed
1/3/2013	2:31:08 PM	Main Vac valve closed
1/3/2013	2:31:08 PM	Bubbler valve closed
1/3/2013	2:31:08 PM	Bypass valve opened
1/3/2013	2:31:08 PM	Helium MFC set to  0.000000
1/3/2013	2:31:08 PM	H2 MFC set to  0.000000
1/3/2013	2:31:08 PM	BCl3 MFC set to  0.000000
1/3/2013	2:31:08 PM	PH3 MFC set to  0.000000
1/3/2013	2:31:08 PM	SiCl4 MFC set to  0.000000
1/3/2013	2:31:08 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	2:31:09 PM	Tube furnace set to 0
1/3/2013	2:32:20 PM	Helium valve closed
1/3/2013	2:32:20 PM	H2 valve closed
1/3/2013	2:32:20 PM	BCl3 valve closed
1/3/2013	2:32:20 PM	PH3 valve closed
1/3/2013	2:32:20 PM	SiCl4 pre valve closed
1/3/2013	2:32:20 PM	SiCl4 post valve closed
1/3/2013	2:32:20 PM	Main Vac valve closed
1/3/2013	2:32:20 PM	Bubbler valve closed
1/3/2013	2:32:20 PM	Bypass valve opened
1/3/2013	2:32:20 PM	Helium MFC set to  0.000000
1/3/2013	2:32:20 PM	H2 MFC set to  0.000000
1/3/2013	2:32:20 PM	BCl3 MFC set to  0.000000
1/3/2013	2:32:20 PM	PH3 MFC set to  0.000000
1/3/2013	2:32:20 PM	SiCl4 MFC set to  0.000000
1/3/2013	2:32:20 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	2:32:20 PM	Tube furnace set to 0
1/3/2013	2:33:19 PM	Helium valve closed
1/3/2013	2:33:19 PM	H2 valve closed
1/3/2013	2:33:19 PM	BCl3 valve closed
1/3/2013	2:33:19 PM	PH3 valve closed
1/3/2013	2:33:19 PM	SiCl4 pre valve closed
1/3/2013	2:33:19 PM	SiCl4 post valve closed
1/3/2013	2:33:19 PM	Bypass valve closed
1/3/2013	2:33:19 PM	Bubbler valve closed
1/3/2013	2:33:19 PM	Main Vac valve opened
1/3/2013	2:33:19 PM	Helium MFC set to  0.000000
1/3/2013	2:33:19 PM	H2 MFC set to  0.000000
1/3/2013	2:33:19 PM	BCl3 MFC set to  0.000000
1/3/2013	2:33:19 PM	PH3 MFC set to  0.000000
1/3/2013	2:33:19 PM	SiCl4 MFC set to  0.000000
1/3/2013	2:33:19 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	2:33:20 PM	Tube furnace set to 0
1/3/2013	2:33:21 PM	Run finished at 2:33 PM
1/3/2013	2:33:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/3/2013	2:33:27 PM	Helium MFC set to  5.000000
1/3/2013	2:33:41 PM	Helium valve opened
1/3/2013	2:34:04 PM	Helium MFC set to  10.000000
1/3/2013	2:34:23 PM	Helium valve closed
1/3/2013	2:34:45 PM	Recipe started at 2:34 PM
1/3/2013	2:34:45 PM	Helium valve closed
1/3/2013	2:34:45 PM	H2 valve closed
1/3/2013	2:34:45 PM	BCl3 valve closed
1/3/2013	2:34:45 PM	PH3 valve closed
1/3/2013	2:34:45 PM	SiCl4 pre valve closed
1/3/2013	2:34:45 PM	SiCl4 post valve closed
1/3/2013	2:34:45 PM	Bypass valve closed
1/3/2013	2:34:45 PM	Bubbler valve closed
1/3/2013	2:34:45 PM	Main Vac valve opened
1/3/2013	2:34:45 PM	Helium MFC set to  0.000000
1/3/2013	2:34:45 PM	H2 MFC set to  0.000000
1/3/2013	2:34:46 PM	BCl3 MFC set to  0.000000
1/3/2013	2:34:46 PM	PH3 MFC set to  0.000000
1/3/2013	2:34:46 PM	SiCl4 MFC set to  0.000000
1/3/2013	2:34:46 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	2:34:46 PM	Tube furnace set to 150
1/3/2013	2:35:16 PM	H2 valve closed
1/3/2013	2:35:16 PM	BCl3 valve closed
1/3/2013	2:35:16 PM	PH3 valve closed
1/3/2013	2:35:16 PM	SiCl4 pre valve closed
1/3/2013	2:35:16 PM	SiCl4 post valve closed
1/3/2013	2:35:16 PM	Bypass valve closed
1/3/2013	2:35:16 PM	Bubbler valve closed
1/3/2013	2:35:16 PM	Helium valve opened
1/3/2013	2:35:16 PM	Main Vac valve opened
1/3/2013	2:35:16 PM	Helium MFC set to  20.000000
1/3/2013	2:35:16 PM	H2 MFC set to  0.000000
1/3/2013	2:35:16 PM	BCl3 MFC set to  0.000000
1/3/2013	2:35:16 PM	PH3 MFC set to  0.000000
1/3/2013	2:35:16 PM	SiCl4 MFC set to  0.000000
1/3/2013	2:35:16 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	2:35:16 PM	Tube furnace set to 150
1/3/2013	2:35:46 PM	Helium valve closed
1/3/2013	2:35:46 PM	H2 valve closed
1/3/2013	2:35:46 PM	BCl3 valve closed
1/3/2013	2:35:46 PM	PH3 valve closed
1/3/2013	2:35:46 PM	SiCl4 pre valve closed
1/3/2013	2:35:46 PM	SiCl4 post valve closed
1/3/2013	2:35:46 PM	Bypass valve closed
1/3/2013	2:35:46 PM	Bubbler valve closed
1/3/2013	2:35:46 PM	Main Vac valve opened
1/3/2013	2:35:46 PM	Helium MFC set to  0.000000
1/3/2013	2:35:46 PM	H2 MFC set to  0.000000
1/3/2013	2:35:46 PM	BCl3 MFC set to  0.000000
1/3/2013	2:35:46 PM	PH3 MFC set to  0.000000
1/3/2013	2:35:46 PM	SiCl4 MFC set to  0.000000
1/3/2013	2:35:46 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	2:35:46 PM	Tube furnace set to 150
1/3/2013	2:36:16 PM	H2 valve closed
1/3/2013	2:36:16 PM	BCl3 valve closed
1/3/2013	2:36:16 PM	PH3 valve closed
1/3/2013	2:36:16 PM	SiCl4 pre valve closed
1/3/2013	2:36:16 PM	SiCl4 post valve closed
1/3/2013	2:36:16 PM	Bypass valve closed
1/3/2013	2:36:16 PM	Bubbler valve closed
1/3/2013	2:36:16 PM	Helium valve opened
1/3/2013	2:36:16 PM	Main Vac valve opened
1/3/2013	2:36:16 PM	Helium MFC set to  20.000000
1/3/2013	2:36:16 PM	H2 MFC set to  0.000000
1/3/2013	2:36:16 PM	BCl3 MFC set to  0.000000
1/3/2013	2:36:16 PM	PH3 MFC set to  0.000000
1/3/2013	2:36:16 PM	SiCl4 MFC set to  0.000000
1/3/2013	2:36:16 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	2:36:16 PM	Tube furnace set to 150
1/3/2013	2:36:46 PM	Helium valve closed
1/3/2013	2:36:46 PM	H2 valve closed
1/3/2013	2:36:46 PM	BCl3 valve closed
1/3/2013	2:36:46 PM	PH3 valve closed
1/3/2013	2:36:46 PM	SiCl4 pre valve closed
1/3/2013	2:36:46 PM	SiCl4 post valve closed
1/3/2013	2:36:46 PM	Bypass valve closed
1/3/2013	2:36:46 PM	Bubbler valve closed
1/3/2013	2:36:46 PM	Main Vac valve opened
1/3/2013	2:36:46 PM	Helium MFC set to  0.000000
1/3/2013	2:36:46 PM	H2 MFC set to  0.000000
1/3/2013	2:36:46 PM	BCl3 MFC set to  0.000000
1/3/2013	2:36:46 PM	PH3 MFC set to  0.000000
1/3/2013	2:36:46 PM	SiCl4 MFC set to  0.000000
1/3/2013	2:36:46 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	2:36:47 PM	Tube furnace set to 150
1/3/2013	2:37:17 PM	H2 valve closed
1/3/2013	2:37:17 PM	BCl3 valve closed
1/3/2013	2:37:17 PM	PH3 valve closed
1/3/2013	2:37:17 PM	SiCl4 pre valve closed
1/3/2013	2:37:17 PM	SiCl4 post valve closed
1/3/2013	2:37:17 PM	Bypass valve closed
1/3/2013	2:37:17 PM	Bubbler valve closed
1/3/2013	2:37:17 PM	Helium valve opened
1/3/2013	2:37:17 PM	Main Vac valve opened
1/3/2013	2:37:17 PM	Helium MFC set to  20.000000
1/3/2013	2:37:17 PM	H2 MFC set to  0.000000
1/3/2013	2:37:17 PM	BCl3 MFC set to  0.000000
1/3/2013	2:37:17 PM	PH3 MFC set to  0.000000
1/3/2013	2:37:17 PM	SiCl4 MFC set to  0.000000
1/3/2013	2:37:17 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	2:37:17 PM	Tube furnace set to 150
1/3/2013	2:37:47 PM	Helium valve closed
1/3/2013	2:37:47 PM	H2 valve closed
1/3/2013	2:37:47 PM	BCl3 valve closed
1/3/2013	2:37:47 PM	PH3 valve closed
1/3/2013	2:37:47 PM	SiCl4 pre valve closed
1/3/2013	2:37:47 PM	SiCl4 post valve closed
1/3/2013	2:37:47 PM	Bypass valve closed
1/3/2013	2:37:47 PM	Bubbler valve closed
1/3/2013	2:37:47 PM	Main Vac valve opened
1/3/2013	2:37:47 PM	Helium MFC set to  0.000000
1/3/2013	2:37:47 PM	H2 MFC set to  0.000000
1/3/2013	2:37:47 PM	BCl3 MFC set to  0.000000
1/3/2013	2:37:47 PM	PH3 MFC set to  0.000000
1/3/2013	2:37:47 PM	SiCl4 MFC set to  0.000000
1/3/2013	2:37:47 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	2:37:47 PM	Tube furnace set to 150
1/3/2013	2:38:17 PM	H2 valve closed
1/3/2013	2:38:17 PM	BCl3 valve closed
1/3/2013	2:38:17 PM	PH3 valve closed
1/3/2013	2:38:17 PM	SiCl4 pre valve closed
1/3/2013	2:38:17 PM	SiCl4 post valve closed
1/3/2013	2:38:17 PM	Bypass valve closed
1/3/2013	2:38:17 PM	Bubbler valve closed
1/3/2013	2:38:17 PM	Helium valve opened
1/3/2013	2:38:17 PM	Main Vac valve opened
1/3/2013	2:38:17 PM	Helium MFC set to  20.000000
1/3/2013	2:38:17 PM	H2 MFC set to  0.000000
1/3/2013	2:38:17 PM	BCl3 MFC set to  0.000000
1/3/2013	2:38:17 PM	PH3 MFC set to  0.000000
1/3/2013	2:38:17 PM	SiCl4 MFC set to  0.000000
1/3/2013	2:38:17 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	2:38:17 PM	Tube furnace set to 150
1/3/2013	2:38:47 PM	Helium valve closed
1/3/2013	2:38:47 PM	H2 valve closed
1/3/2013	2:38:47 PM	BCl3 valve closed
1/3/2013	2:38:47 PM	PH3 valve closed
1/3/2013	2:38:47 PM	SiCl4 pre valve closed
1/3/2013	2:38:47 PM	SiCl4 post valve closed
1/3/2013	2:38:47 PM	Bypass valve closed
1/3/2013	2:38:47 PM	Bubbler valve closed
1/3/2013	2:38:47 PM	Main Vac valve opened
1/3/2013	2:38:47 PM	Helium MFC set to  0.000000
1/3/2013	2:38:47 PM	H2 MFC set to  0.000000
1/3/2013	2:38:47 PM	BCl3 MFC set to  0.000000
1/3/2013	2:38:47 PM	PH3 MFC set to  0.000000
1/3/2013	2:38:47 PM	SiCl4 MFC set to  0.000000
1/3/2013	2:38:47 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	2:38:48 PM	Tube furnace set to 150
1/3/2013	2:39:18 PM	H2 valve closed
1/3/2013	2:39:18 PM	BCl3 valve closed
1/3/2013	2:39:18 PM	PH3 valve closed
1/3/2013	2:39:18 PM	SiCl4 pre valve closed
1/3/2013	2:39:18 PM	SiCl4 post valve closed
1/3/2013	2:39:18 PM	Bypass valve closed
1/3/2013	2:39:18 PM	Bubbler valve closed
1/3/2013	2:39:18 PM	Helium valve opened
1/3/2013	2:39:18 PM	Main Vac valve opened
1/3/2013	2:39:18 PM	Helium MFC set to  20.000000
1/3/2013	2:39:18 PM	H2 MFC set to  0.000000
1/3/2013	2:39:18 PM	BCl3 MFC set to  0.000000
1/3/2013	2:39:18 PM	PH3 MFC set to  0.000000
1/3/2013	2:39:18 PM	SiCl4 MFC set to  0.000000
1/3/2013	2:39:18 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	2:39:18 PM	Tube furnace set to 150
1/3/2013	2:39:48 PM	Helium valve closed
1/3/2013	2:39:48 PM	H2 valve closed
1/3/2013	2:39:48 PM	BCl3 valve closed
1/3/2013	2:39:48 PM	PH3 valve closed
1/3/2013	2:39:48 PM	SiCl4 pre valve closed
1/3/2013	2:39:48 PM	SiCl4 post valve closed
1/3/2013	2:39:48 PM	Bypass valve closed
1/3/2013	2:39:48 PM	Bubbler valve closed
1/3/2013	2:39:48 PM	Main Vac valve opened
1/3/2013	2:39:48 PM	Helium MFC set to  0.000000
1/3/2013	2:39:48 PM	H2 MFC set to  0.000000
1/3/2013	2:39:48 PM	BCl3 MFC set to  0.000000
1/3/2013	2:39:48 PM	PH3 MFC set to  0.000000
1/3/2013	2:39:48 PM	SiCl4 MFC set to  0.000000
1/3/2013	2:39:48 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	2:39:48 PM	Tube furnace set to 150
1/3/2013	2:40:18 PM	H2 valve closed
1/3/2013	2:40:18 PM	BCl3 valve closed
1/3/2013	2:40:18 PM	PH3 valve closed
1/3/2013	2:40:18 PM	SiCl4 pre valve closed
1/3/2013	2:40:18 PM	SiCl4 post valve closed
1/3/2013	2:40:18 PM	Bypass valve closed
1/3/2013	2:40:18 PM	Bubbler valve closed
1/3/2013	2:40:18 PM	Helium valve opened
1/3/2013	2:40:18 PM	Main Vac valve opened
1/3/2013	2:40:18 PM	Helium MFC set to  20.000000
1/3/2013	2:40:18 PM	H2 MFC set to  0.000000
1/3/2013	2:40:18 PM	BCl3 MFC set to  0.000000
1/3/2013	2:40:18 PM	PH3 MFC set to  0.000000
1/3/2013	2:40:18 PM	SiCl4 MFC set to  0.000000
1/3/2013	2:40:18 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	2:40:18 PM	Tube furnace set to 150
1/3/2013	2:40:48 PM	Helium valve closed
1/3/2013	2:40:48 PM	H2 valve closed
1/3/2013	2:40:48 PM	BCl3 valve closed
1/3/2013	2:40:48 PM	PH3 valve closed
1/3/2013	2:40:48 PM	SiCl4 pre valve closed
1/3/2013	2:40:48 PM	SiCl4 post valve closed
1/3/2013	2:40:48 PM	Bypass valve closed
1/3/2013	2:40:48 PM	Bubbler valve closed
1/3/2013	2:40:48 PM	Main Vac valve opened
1/3/2013	2:40:48 PM	Helium MFC set to  0.000000
1/3/2013	2:40:48 PM	H2 MFC set to  0.000000
1/3/2013	2:40:48 PM	BCl3 MFC set to  0.000000
1/3/2013	2:40:48 PM	PH3 MFC set to  0.000000
1/3/2013	2:40:48 PM	SiCl4 MFC set to  0.000000
1/3/2013	2:40:48 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	2:40:49 PM	Tube furnace set to 150
1/3/2013	2:41:19 PM	H2 valve closed
1/3/2013	2:41:19 PM	BCl3 valve closed
1/3/2013	2:41:19 PM	PH3 valve closed
1/3/2013	2:41:19 PM	SiCl4 pre valve closed
1/3/2013	2:41:19 PM	SiCl4 post valve closed
1/3/2013	2:41:19 PM	Bypass valve closed
1/3/2013	2:41:19 PM	Bubbler valve closed
1/3/2013	2:41:19 PM	Helium valve opened
1/3/2013	2:41:19 PM	Main Vac valve opened
1/3/2013	2:41:19 PM	Helium MFC set to  20.000000
1/3/2013	2:41:19 PM	H2 MFC set to  0.000000
1/3/2013	2:41:19 PM	BCl3 MFC set to  0.000000
1/3/2013	2:41:19 PM	PH3 MFC set to  0.000000
1/3/2013	2:41:19 PM	SiCl4 MFC set to  0.000000
1/3/2013	2:41:19 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	2:41:19 PM	Tube furnace set to 150
1/3/2013	2:41:49 PM	Helium valve closed
1/3/2013	2:41:49 PM	H2 valve closed
1/3/2013	2:41:49 PM	BCl3 valve closed
1/3/2013	2:41:49 PM	PH3 valve closed
1/3/2013	2:41:49 PM	SiCl4 pre valve closed
1/3/2013	2:41:49 PM	SiCl4 post valve closed
1/3/2013	2:41:49 PM	Bypass valve closed
1/3/2013	2:41:49 PM	Bubbler valve closed
1/3/2013	2:41:49 PM	Main Vac valve opened
1/3/2013	2:41:49 PM	Helium MFC set to  0.000000
1/3/2013	2:41:49 PM	H2 MFC set to  0.000000
1/3/2013	2:41:49 PM	BCl3 MFC set to  0.000000
1/3/2013	2:41:49 PM	PH3 MFC set to  0.000000
1/3/2013	2:41:49 PM	SiCl4 MFC set to  0.000000
1/3/2013	2:41:49 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	2:41:49 PM	Tube furnace set to 150
1/3/2013	2:42:19 PM	H2 valve closed
1/3/2013	2:42:19 PM	BCl3 valve closed
1/3/2013	2:42:19 PM	PH3 valve closed
1/3/2013	2:42:19 PM	SiCl4 pre valve closed
1/3/2013	2:42:19 PM	SiCl4 post valve closed
1/3/2013	2:42:19 PM	Bypass valve closed
1/3/2013	2:42:19 PM	Bubbler valve closed
1/3/2013	2:42:19 PM	Helium valve opened
1/3/2013	2:42:19 PM	Main Vac valve opened
1/3/2013	2:42:19 PM	Helium MFC set to  20.000000
1/3/2013	2:42:19 PM	H2 MFC set to  0.000000
1/3/2013	2:42:19 PM	BCl3 MFC set to  0.000000
1/3/2013	2:42:19 PM	PH3 MFC set to  0.000000
1/3/2013	2:42:19 PM	SiCl4 MFC set to  0.000000
1/3/2013	2:42:19 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	2:42:19 PM	Tube furnace set to 150
1/3/2013	2:42:49 PM	Helium valve closed
1/3/2013	2:42:49 PM	H2 valve closed
1/3/2013	2:42:49 PM	BCl3 valve closed
1/3/2013	2:42:49 PM	PH3 valve closed
1/3/2013	2:42:49 PM	SiCl4 pre valve closed
1/3/2013	2:42:49 PM	SiCl4 post valve closed
1/3/2013	2:42:49 PM	Bypass valve closed
1/3/2013	2:42:49 PM	Bubbler valve closed
1/3/2013	2:42:49 PM	Main Vac valve opened
1/3/2013	2:42:49 PM	Helium MFC set to  0.000000
1/3/2013	2:42:49 PM	H2 MFC set to  0.000000
1/3/2013	2:42:49 PM	BCl3 MFC set to  0.000000
1/3/2013	2:42:49 PM	PH3 MFC set to  0.000000
1/3/2013	2:42:49 PM	SiCl4 MFC set to  0.000000
1/3/2013	2:42:49 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	2:42:50 PM	Tube furnace set to 150
1/3/2013	2:43:20 PM	H2 valve closed
1/3/2013	2:43:20 PM	BCl3 valve closed
1/3/2013	2:43:20 PM	PH3 valve closed
1/3/2013	2:43:20 PM	SiCl4 pre valve closed
1/3/2013	2:43:20 PM	SiCl4 post valve closed
1/3/2013	2:43:20 PM	Bypass valve closed
1/3/2013	2:43:20 PM	Bubbler valve closed
1/3/2013	2:43:20 PM	Helium valve opened
1/3/2013	2:43:20 PM	Main Vac valve opened
1/3/2013	2:43:20 PM	Helium MFC set to  20.000000
1/3/2013	2:43:20 PM	H2 MFC set to  0.000000
1/3/2013	2:43:20 PM	BCl3 MFC set to  0.000000
1/3/2013	2:43:20 PM	PH3 MFC set to  0.000000
1/3/2013	2:43:20 PM	SiCl4 MFC set to  0.000000
1/3/2013	2:43:20 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	2:43:20 PM	Tube furnace set to 150
1/3/2013	2:43:50 PM	Helium valve closed
1/3/2013	2:43:50 PM	H2 valve closed
1/3/2013	2:43:50 PM	BCl3 valve closed
1/3/2013	2:43:50 PM	PH3 valve closed
1/3/2013	2:43:50 PM	SiCl4 pre valve closed
1/3/2013	2:43:50 PM	SiCl4 post valve closed
1/3/2013	2:43:50 PM	Bypass valve closed
1/3/2013	2:43:50 PM	Bubbler valve closed
1/3/2013	2:43:50 PM	Main Vac valve opened
1/3/2013	2:43:50 PM	Helium MFC set to  0.000000
1/3/2013	2:43:50 PM	H2 MFC set to  0.000000
1/3/2013	2:43:50 PM	BCl3 MFC set to  0.000000
1/3/2013	2:43:50 PM	PH3 MFC set to  0.000000
1/3/2013	2:43:50 PM	SiCl4 MFC set to  0.000000
1/3/2013	2:43:50 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	2:43:50 PM	Tube furnace set to 150
1/3/2013	2:44:20 PM	H2 valve closed
1/3/2013	2:44:20 PM	BCl3 valve closed
1/3/2013	2:44:20 PM	PH3 valve closed
1/3/2013	2:44:20 PM	SiCl4 pre valve closed
1/3/2013	2:44:20 PM	SiCl4 post valve closed
1/3/2013	2:44:20 PM	Bypass valve closed
1/3/2013	2:44:20 PM	Bubbler valve closed
1/3/2013	2:44:20 PM	Helium valve opened
1/3/2013	2:44:20 PM	Main Vac valve opened
1/3/2013	2:44:20 PM	Helium MFC set to  20.000000
1/3/2013	2:44:20 PM	H2 MFC set to  0.000000
1/3/2013	2:44:20 PM	BCl3 MFC set to  0.000000
1/3/2013	2:44:20 PM	PH3 MFC set to  0.000000
1/3/2013	2:44:20 PM	SiCl4 MFC set to  0.000000
1/3/2013	2:44:20 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	2:44:20 PM	Tube furnace set to 150
1/3/2013	2:44:50 PM	Helium valve closed
1/3/2013	2:44:50 PM	H2 valve closed
1/3/2013	2:44:50 PM	BCl3 valve closed
1/3/2013	2:44:50 PM	PH3 valve closed
1/3/2013	2:44:50 PM	SiCl4 pre valve closed
1/3/2013	2:44:50 PM	SiCl4 post valve closed
1/3/2013	2:44:50 PM	Bypass valve closed
1/3/2013	2:44:50 PM	Bubbler valve closed
1/3/2013	2:44:50 PM	Main Vac valve opened
1/3/2013	2:44:50 PM	Helium MFC set to  0.000000
1/3/2013	2:44:50 PM	H2 MFC set to  0.000000
1/3/2013	2:44:50 PM	BCl3 MFC set to  0.000000
1/3/2013	2:44:50 PM	PH3 MFC set to  0.000000
1/3/2013	2:44:50 PM	SiCl4 MFC set to  0.000000
1/3/2013	2:44:50 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	2:44:51 PM	Tube furnace set to 150
1/3/2013	2:44:52 PM	Run finished at 2:44 PM
1/3/2013	3:40:25 PM	Main Vac valve closed
1/3/2013	3:40:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/3/2013	3:40:37 PM	Recipe started at 3:40 PM
1/3/2013	3:40:37 PM	Helium valve closed
1/3/2013	3:40:37 PM	H2 valve closed
1/3/2013	3:40:37 PM	BCl3 valve closed
1/3/2013	3:40:37 PM	PH3 valve closed
1/3/2013	3:40:37 PM	SiCl4 pre valve closed
1/3/2013	3:40:37 PM	SiCl4 post valve closed
1/3/2013	3:40:37 PM	Main Vac valve closed
1/3/2013	3:40:37 PM	Bypass valve closed
1/3/2013	3:40:37 PM	Bubbler valve closed
1/3/2013	3:40:37 PM	Helium MFC set to  0.000000
1/3/2013	3:40:37 PM	H2 MFC set to  0.000000
1/3/2013	3:40:37 PM	BCl3 MFC set to  0.000000
1/3/2013	3:40:37 PM	PH3 MFC set to  0.000000
1/3/2013	3:40:37 PM	SiCl4 MFC set to  0.000000
1/3/2013	3:40:37 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	3:40:37 PM	Tube furnace set to 0
1/3/2013	3:40:40 PM	H2 valve closed
1/3/2013	3:40:40 PM	BCl3 valve closed
1/3/2013	3:40:41 PM	PH3 valve closed
1/3/2013	3:40:41 PM	SiCl4 pre valve closed
1/3/2013	3:40:41 PM	SiCl4 post valve closed
1/3/2013	3:40:41 PM	Main Vac valve closed
1/3/2013	3:40:41 PM	Bypass valve closed
1/3/2013	3:40:41 PM	Bubbler valve closed
1/3/2013	3:40:41 PM	Helium valve opened
1/3/2013	3:40:41 PM	Helium MFC set to  500.000000
1/3/2013	3:40:41 PM	H2 MFC set to  0.000000
1/3/2013	3:40:41 PM	BCl3 MFC set to  0.000000
1/3/2013	3:40:41 PM	PH3 MFC set to  0.000000
1/3/2013	3:40:41 PM	SiCl4 MFC set to  0.000000
1/3/2013	3:40:41 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	3:40:41 PM	Tube furnace set to 0
1/3/2013	3:41:50 PM	Helium valve closed
1/3/2013	3:41:50 PM	H2 valve closed
1/3/2013	3:41:50 PM	BCl3 valve closed
1/3/2013	3:41:50 PM	PH3 valve closed
1/3/2013	3:41:50 PM	SiCl4 pre valve closed
1/3/2013	3:41:50 PM	SiCl4 post valve closed
1/3/2013	3:41:50 PM	Main Vac valve closed
1/3/2013	3:41:50 PM	Bypass valve closed
1/3/2013	3:41:50 PM	Bubbler valve closed
1/3/2013	3:41:50 PM	Helium MFC set to  0.000000
1/3/2013	3:41:50 PM	H2 MFC set to  0.000000
1/3/2013	3:41:50 PM	BCl3 MFC set to  0.000000
1/3/2013	3:41:50 PM	PH3 MFC set to  0.000000
1/3/2013	3:41:50 PM	SiCl4 MFC set to  0.000000
1/3/2013	3:41:50 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	3:41:50 PM	Tube furnace set to 0
1/3/2013	3:41:51 PM	Run finished at 3:41 PM
1/3/2013	3:41:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/3/2013	3:49:04 PM	Bypass valve opened
1/3/2013	3:49:11 PM	Tube furnace set to 150
1/3/2013	3:50:20 PM	Main Vac valve opened
1/3/2013	3:50:20 PM	Bypass valve closed
1/3/2013	4:15:10 PM	Recipe started at 4:15 PM
1/3/2013	4:15:10 PM	Helium valve closed
1/3/2013	4:15:10 PM	H2 valve closed
1/3/2013	4:15:10 PM	BCl3 valve closed
1/3/2013	4:15:10 PM	PH3 valve closed
1/3/2013	4:15:10 PM	SiCl4 pre valve closed
1/3/2013	4:15:10 PM	SiCl4 post valve closed
1/3/2013	4:15:10 PM	Bypass valve closed
1/3/2013	4:15:10 PM	Bubbler valve closed
1/3/2013	4:15:10 PM	Main Vac valve opened
1/3/2013	4:15:10 PM	Helium MFC set to  0.000000
1/3/2013	4:15:10 PM	H2 MFC set to  0.000000
1/3/2013	4:15:10 PM	BCl3 MFC set to  0.000000
1/3/2013	4:15:10 PM	PH3 MFC set to  0.000000
1/3/2013	4:15:10 PM	SiCl4 MFC set to  0.000000
1/3/2013	4:15:10 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	4:15:10 PM	Tube furnace set to 150
1/3/2013	4:15:40 PM	H2 valve closed
1/3/2013	4:15:40 PM	BCl3 valve closed
1/3/2013	4:15:40 PM	PH3 valve closed
1/3/2013	4:15:40 PM	SiCl4 pre valve closed
1/3/2013	4:15:40 PM	SiCl4 post valve closed
1/3/2013	4:15:40 PM	Bypass valve closed
1/3/2013	4:15:40 PM	Bubbler valve closed
1/3/2013	4:15:40 PM	Helium valve opened
1/3/2013	4:15:40 PM	Main Vac valve opened
1/3/2013	4:15:40 PM	Helium MFC set to  20.000000
1/3/2013	4:15:40 PM	H2 MFC set to  0.000000
1/3/2013	4:15:40 PM	BCl3 MFC set to  0.000000
1/3/2013	4:15:40 PM	PH3 MFC set to  0.000000
1/3/2013	4:15:40 PM	SiCl4 MFC set to  0.000000
1/3/2013	4:15:40 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	4:15:40 PM	Tube furnace set to 150
1/3/2013	4:16:10 PM	Helium valve closed
1/3/2013	4:16:10 PM	H2 valve closed
1/3/2013	4:16:10 PM	BCl3 valve closed
1/3/2013	4:16:10 PM	PH3 valve closed
1/3/2013	4:16:10 PM	SiCl4 pre valve closed
1/3/2013	4:16:10 PM	SiCl4 post valve closed
1/3/2013	4:16:10 PM	Bypass valve closed
1/3/2013	4:16:10 PM	Bubbler valve closed
1/3/2013	4:16:10 PM	Main Vac valve opened
1/3/2013	4:16:10 PM	Helium MFC set to  0.000000
1/3/2013	4:16:10 PM	H2 MFC set to  0.000000
1/3/2013	4:16:10 PM	BCl3 MFC set to  0.000000
1/3/2013	4:16:10 PM	PH3 MFC set to  0.000000
1/3/2013	4:16:10 PM	SiCl4 MFC set to  0.000000
1/3/2013	4:16:10 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	4:16:11 PM	Tube furnace set to 150
1/3/2013	4:16:41 PM	H2 valve closed
1/3/2013	4:16:41 PM	BCl3 valve closed
1/3/2013	4:16:41 PM	PH3 valve closed
1/3/2013	4:16:41 PM	SiCl4 pre valve closed
1/3/2013	4:16:41 PM	SiCl4 post valve closed
1/3/2013	4:16:41 PM	Bypass valve closed
1/3/2013	4:16:41 PM	Bubbler valve closed
1/3/2013	4:16:41 PM	Helium valve opened
1/3/2013	4:16:41 PM	Main Vac valve opened
1/3/2013	4:16:41 PM	Helium MFC set to  20.000000
1/3/2013	4:16:41 PM	H2 MFC set to  0.000000
1/3/2013	4:16:41 PM	BCl3 MFC set to  0.000000
1/3/2013	4:16:41 PM	PH3 MFC set to  0.000000
1/3/2013	4:16:41 PM	SiCl4 MFC set to  0.000000
1/3/2013	4:16:41 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	4:16:41 PM	Tube furnace set to 150
1/3/2013	4:17:11 PM	Helium valve closed
1/3/2013	4:17:11 PM	H2 valve closed
1/3/2013	4:17:11 PM	BCl3 valve closed
1/3/2013	4:17:11 PM	PH3 valve closed
1/3/2013	4:17:11 PM	SiCl4 pre valve closed
1/3/2013	4:17:11 PM	SiCl4 post valve closed
1/3/2013	4:17:11 PM	Bypass valve closed
1/3/2013	4:17:11 PM	Bubbler valve closed
1/3/2013	4:17:11 PM	Main Vac valve opened
1/3/2013	4:17:11 PM	Helium MFC set to  0.000000
1/3/2013	4:17:11 PM	H2 MFC set to  0.000000
1/3/2013	4:17:11 PM	BCl3 MFC set to  0.000000
1/3/2013	4:17:11 PM	PH3 MFC set to  0.000000
1/3/2013	4:17:11 PM	SiCl4 MFC set to  0.000000
1/3/2013	4:17:11 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	4:17:11 PM	Tube furnace set to 150
1/3/2013	4:17:41 PM	H2 valve closed
1/3/2013	4:17:41 PM	BCl3 valve closed
1/3/2013	4:17:41 PM	PH3 valve closed
1/3/2013	4:17:41 PM	SiCl4 pre valve closed
1/3/2013	4:17:41 PM	SiCl4 post valve closed
1/3/2013	4:17:41 PM	Bypass valve closed
1/3/2013	4:17:41 PM	Bubbler valve closed
1/3/2013	4:17:41 PM	Helium valve opened
1/3/2013	4:17:41 PM	Main Vac valve opened
1/3/2013	4:17:41 PM	Helium MFC set to  20.000000
1/3/2013	4:17:41 PM	H2 MFC set to  0.000000
1/3/2013	4:17:41 PM	BCl3 MFC set to  0.000000
1/3/2013	4:17:41 PM	PH3 MFC set to  0.000000
1/3/2013	4:17:41 PM	SiCl4 MFC set to  0.000000
1/3/2013	4:17:41 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	4:17:41 PM	Tube furnace set to 150
1/3/2013	4:18:11 PM	Helium valve closed
1/3/2013	4:18:11 PM	H2 valve closed
1/3/2013	4:18:11 PM	BCl3 valve closed
1/3/2013	4:18:11 PM	PH3 valve closed
1/3/2013	4:18:11 PM	SiCl4 pre valve closed
1/3/2013	4:18:11 PM	SiCl4 post valve closed
1/3/2013	4:18:11 PM	Bypass valve closed
1/3/2013	4:18:11 PM	Bubbler valve closed
1/3/2013	4:18:11 PM	Main Vac valve opened
1/3/2013	4:18:11 PM	Helium MFC set to  0.000000
1/3/2013	4:18:11 PM	H2 MFC set to  0.000000
1/3/2013	4:18:11 PM	BCl3 MFC set to  0.000000
1/3/2013	4:18:11 PM	PH3 MFC set to  0.000000
1/3/2013	4:18:11 PM	SiCl4 MFC set to  0.000000
1/3/2013	4:18:11 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	4:18:11 PM	Tube furnace set to 150
1/3/2013	4:18:42 PM	H2 valve closed
1/3/2013	4:18:42 PM	BCl3 valve closed
1/3/2013	4:18:42 PM	PH3 valve closed
1/3/2013	4:18:42 PM	SiCl4 pre valve closed
1/3/2013	4:18:42 PM	SiCl4 post valve closed
1/3/2013	4:18:42 PM	Bypass valve closed
1/3/2013	4:18:42 PM	Bubbler valve closed
1/3/2013	4:18:42 PM	Helium valve opened
1/3/2013	4:18:42 PM	Main Vac valve opened
1/3/2013	4:18:42 PM	Helium MFC set to  20.000000
1/3/2013	4:18:42 PM	H2 MFC set to  0.000000
1/3/2013	4:18:42 PM	BCl3 MFC set to  0.000000
1/3/2013	4:18:42 PM	PH3 MFC set to  0.000000
1/3/2013	4:18:42 PM	SiCl4 MFC set to  0.000000
1/3/2013	4:18:42 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	4:18:42 PM	Tube furnace set to 150
1/3/2013	4:19:12 PM	Helium valve closed
1/3/2013	4:19:12 PM	H2 valve closed
1/3/2013	4:19:12 PM	BCl3 valve closed
1/3/2013	4:19:12 PM	PH3 valve closed
1/3/2013	4:19:12 PM	SiCl4 pre valve closed
1/3/2013	4:19:12 PM	SiCl4 post valve closed
1/3/2013	4:19:12 PM	Bypass valve closed
1/3/2013	4:19:12 PM	Bubbler valve closed
1/3/2013	4:19:12 PM	Main Vac valve opened
1/3/2013	4:19:12 PM	Helium MFC set to  0.000000
1/3/2013	4:19:12 PM	H2 MFC set to  0.000000
1/3/2013	4:19:12 PM	BCl3 MFC set to  0.000000
1/3/2013	4:19:12 PM	PH3 MFC set to  0.000000
1/3/2013	4:19:12 PM	SiCl4 MFC set to  0.000000
1/3/2013	4:19:12 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	4:19:12 PM	Tube furnace set to 150
1/3/2013	4:19:42 PM	H2 valve closed
1/3/2013	4:19:42 PM	BCl3 valve closed
1/3/2013	4:19:42 PM	PH3 valve closed
1/3/2013	4:19:42 PM	SiCl4 pre valve closed
1/3/2013	4:19:42 PM	SiCl4 post valve closed
1/3/2013	4:19:42 PM	Bypass valve closed
1/3/2013	4:19:42 PM	Bubbler valve closed
1/3/2013	4:19:42 PM	Helium valve opened
1/3/2013	4:19:42 PM	Main Vac valve opened
1/3/2013	4:19:42 PM	Helium MFC set to  20.000000
1/3/2013	4:19:42 PM	H2 MFC set to  0.000000
1/3/2013	4:19:42 PM	BCl3 MFC set to  0.000000
1/3/2013	4:19:42 PM	PH3 MFC set to  0.000000
1/3/2013	4:19:42 PM	SiCl4 MFC set to  0.000000
1/3/2013	4:19:42 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	4:19:42 PM	Tube furnace set to 150
1/3/2013	4:20:12 PM	Helium valve closed
1/3/2013	4:20:12 PM	H2 valve closed
1/3/2013	4:20:12 PM	BCl3 valve closed
1/3/2013	4:20:12 PM	PH3 valve closed
1/3/2013	4:20:12 PM	SiCl4 pre valve closed
1/3/2013	4:20:12 PM	SiCl4 post valve closed
1/3/2013	4:20:12 PM	Bypass valve closed
1/3/2013	4:20:12 PM	Bubbler valve closed
1/3/2013	4:20:12 PM	Main Vac valve opened
1/3/2013	4:20:12 PM	Helium MFC set to  0.000000
1/3/2013	4:20:12 PM	H2 MFC set to  0.000000
1/3/2013	4:20:12 PM	BCl3 MFC set to  0.000000
1/3/2013	4:20:12 PM	PH3 MFC set to  0.000000
1/3/2013	4:20:12 PM	SiCl4 MFC set to  0.000000
1/3/2013	4:20:12 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	4:20:12 PM	Tube furnace set to 150
1/3/2013	4:20:42 PM	H2 valve closed
1/3/2013	4:20:42 PM	BCl3 valve closed
1/3/2013	4:20:42 PM	PH3 valve closed
1/3/2013	4:20:43 PM	SiCl4 pre valve closed
1/3/2013	4:20:43 PM	SiCl4 post valve closed
1/3/2013	4:20:43 PM	Bypass valve closed
1/3/2013	4:20:43 PM	Bubbler valve closed
1/3/2013	4:20:43 PM	Helium valve opened
1/3/2013	4:20:43 PM	Main Vac valve opened
1/3/2013	4:20:43 PM	Helium MFC set to  20.000000
1/3/2013	4:20:43 PM	H2 MFC set to  0.000000
1/3/2013	4:20:43 PM	BCl3 MFC set to  0.000000
1/3/2013	4:20:43 PM	PH3 MFC set to  0.000000
1/3/2013	4:20:43 PM	SiCl4 MFC set to  0.000000
1/3/2013	4:20:43 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	4:20:43 PM	Tube furnace set to 150
1/3/2013	4:21:13 PM	Helium valve closed
1/3/2013	4:21:13 PM	H2 valve closed
1/3/2013	4:21:13 PM	BCl3 valve closed
1/3/2013	4:21:13 PM	PH3 valve closed
1/3/2013	4:21:13 PM	SiCl4 pre valve closed
1/3/2013	4:21:13 PM	SiCl4 post valve closed
1/3/2013	4:21:13 PM	Bypass valve closed
1/3/2013	4:21:13 PM	Bubbler valve closed
1/3/2013	4:21:13 PM	Main Vac valve opened
1/3/2013	4:21:13 PM	Helium MFC set to  0.000000
1/3/2013	4:21:13 PM	H2 MFC set to  0.000000
1/3/2013	4:21:13 PM	BCl3 MFC set to  0.000000
1/3/2013	4:21:13 PM	PH3 MFC set to  0.000000
1/3/2013	4:21:13 PM	SiCl4 MFC set to  0.000000
1/3/2013	4:21:13 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	4:21:13 PM	Tube furnace set to 150
1/3/2013	4:21:43 PM	H2 valve closed
1/3/2013	4:21:43 PM	BCl3 valve closed
1/3/2013	4:21:43 PM	PH3 valve closed
1/3/2013	4:21:43 PM	SiCl4 pre valve closed
1/3/2013	4:21:43 PM	SiCl4 post valve closed
1/3/2013	4:21:43 PM	Bypass valve closed
1/3/2013	4:21:43 PM	Bubbler valve closed
1/3/2013	4:21:43 PM	Helium valve opened
1/3/2013	4:21:43 PM	Main Vac valve opened
1/3/2013	4:21:43 PM	Helium MFC set to  20.000000
1/3/2013	4:21:43 PM	H2 MFC set to  0.000000
1/3/2013	4:21:43 PM	BCl3 MFC set to  0.000000
1/3/2013	4:21:43 PM	PH3 MFC set to  0.000000
1/3/2013	4:21:43 PM	SiCl4 MFC set to  0.000000
1/3/2013	4:21:43 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	4:21:43 PM	Tube furnace set to 150
1/3/2013	4:22:13 PM	Helium valve closed
1/3/2013	4:22:13 PM	H2 valve closed
1/3/2013	4:22:13 PM	BCl3 valve closed
1/3/2013	4:22:13 PM	PH3 valve closed
1/3/2013	4:22:13 PM	SiCl4 pre valve closed
1/3/2013	4:22:13 PM	SiCl4 post valve closed
1/3/2013	4:22:13 PM	Bypass valve closed
1/3/2013	4:22:13 PM	Bubbler valve closed
1/3/2013	4:22:13 PM	Main Vac valve opened
1/3/2013	4:22:13 PM	Helium MFC set to  0.000000
1/3/2013	4:22:13 PM	H2 MFC set to  0.000000
1/3/2013	4:22:13 PM	BCl3 MFC set to  0.000000
1/3/2013	4:22:13 PM	PH3 MFC set to  0.000000
1/3/2013	4:22:13 PM	SiCl4 MFC set to  0.000000
1/3/2013	4:22:13 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	4:22:13 PM	Tube furnace set to 150
1/3/2013	4:22:43 PM	H2 valve closed
1/3/2013	4:22:43 PM	BCl3 valve closed
1/3/2013	4:22:43 PM	PH3 valve closed
1/3/2013	4:22:44 PM	SiCl4 pre valve closed
1/3/2013	4:22:44 PM	SiCl4 post valve closed
1/3/2013	4:22:44 PM	Bypass valve closed
1/3/2013	4:22:44 PM	Bubbler valve closed
1/3/2013	4:22:44 PM	Helium valve opened
1/3/2013	4:22:44 PM	Main Vac valve opened
1/3/2013	4:22:44 PM	Helium MFC set to  20.000000
1/3/2013	4:22:44 PM	H2 MFC set to  0.000000
1/3/2013	4:22:44 PM	BCl3 MFC set to  0.000000
1/3/2013	4:22:44 PM	PH3 MFC set to  0.000000
1/3/2013	4:22:44 PM	SiCl4 MFC set to  0.000000
1/3/2013	4:22:44 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	4:22:44 PM	Tube furnace set to 150
1/3/2013	4:23:14 PM	Helium valve closed
1/3/2013	4:23:14 PM	H2 valve closed
1/3/2013	4:23:14 PM	BCl3 valve closed
1/3/2013	4:23:14 PM	PH3 valve closed
1/3/2013	4:23:14 PM	SiCl4 pre valve closed
1/3/2013	4:23:14 PM	SiCl4 post valve closed
1/3/2013	4:23:14 PM	Bypass valve closed
1/3/2013	4:23:14 PM	Bubbler valve closed
1/3/2013	4:23:14 PM	Main Vac valve opened
1/3/2013	4:23:14 PM	Helium MFC set to  0.000000
1/3/2013	4:23:14 PM	H2 MFC set to  0.000000
1/3/2013	4:23:14 PM	BCl3 MFC set to  0.000000
1/3/2013	4:23:14 PM	PH3 MFC set to  0.000000
1/3/2013	4:23:14 PM	SiCl4 MFC set to  0.000000
1/3/2013	4:23:14 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	4:23:14 PM	Tube furnace set to 150
1/3/2013	4:23:44 PM	H2 valve closed
1/3/2013	4:23:44 PM	BCl3 valve closed
1/3/2013	4:23:44 PM	PH3 valve closed
1/3/2013	4:23:44 PM	SiCl4 pre valve closed
1/3/2013	4:23:44 PM	SiCl4 post valve closed
1/3/2013	4:23:44 PM	Bypass valve closed
1/3/2013	4:23:44 PM	Bubbler valve closed
1/3/2013	4:23:44 PM	Helium valve opened
1/3/2013	4:23:44 PM	Main Vac valve opened
1/3/2013	4:23:44 PM	Helium MFC set to  20.000000
1/3/2013	4:23:44 PM	H2 MFC set to  0.000000
1/3/2013	4:23:44 PM	BCl3 MFC set to  0.000000
1/3/2013	4:23:44 PM	PH3 MFC set to  0.000000
1/3/2013	4:23:44 PM	SiCl4 MFC set to  0.000000
1/3/2013	4:23:44 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	4:23:44 PM	Tube furnace set to 150
1/3/2013	4:24:14 PM	Helium valve closed
1/3/2013	4:24:14 PM	H2 valve closed
1/3/2013	4:24:14 PM	BCl3 valve closed
1/3/2013	4:24:14 PM	PH3 valve closed
1/3/2013	4:24:14 PM	SiCl4 pre valve closed
1/3/2013	4:24:14 PM	SiCl4 post valve closed
1/3/2013	4:24:14 PM	Bypass valve closed
1/3/2013	4:24:14 PM	Bubbler valve closed
1/3/2013	4:24:14 PM	Main Vac valve opened
1/3/2013	4:24:14 PM	Helium MFC set to  0.000000
1/3/2013	4:24:14 PM	H2 MFC set to  0.000000
1/3/2013	4:24:14 PM	BCl3 MFC set to  0.000000
1/3/2013	4:24:14 PM	PH3 MFC set to  0.000000
1/3/2013	4:24:14 PM	SiCl4 MFC set to  0.000000
1/3/2013	4:24:14 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	4:24:14 PM	Tube furnace set to 150
1/3/2013	4:24:44 PM	H2 valve closed
1/3/2013	4:24:44 PM	BCl3 valve closed
1/3/2013	4:24:44 PM	PH3 valve closed
1/3/2013	4:24:44 PM	SiCl4 pre valve closed
1/3/2013	4:24:44 PM	SiCl4 post valve closed
1/3/2013	4:24:45 PM	Bypass valve closed
1/3/2013	4:24:45 PM	Bubbler valve closed
1/3/2013	4:24:45 PM	Helium valve opened
1/3/2013	4:24:45 PM	Main Vac valve opened
1/3/2013	4:24:45 PM	Helium MFC set to  20.000000
1/3/2013	4:24:45 PM	H2 MFC set to  0.000000
1/3/2013	4:24:45 PM	BCl3 MFC set to  0.000000
1/3/2013	4:24:45 PM	PH3 MFC set to  0.000000
1/3/2013	4:24:45 PM	SiCl4 MFC set to  0.000000
1/3/2013	4:24:45 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	4:24:45 PM	Tube furnace set to 150
1/3/2013	4:25:15 PM	Helium valve closed
1/3/2013	4:25:15 PM	H2 valve closed
1/3/2013	4:25:15 PM	BCl3 valve closed
1/3/2013	4:25:15 PM	PH3 valve closed
1/3/2013	4:25:15 PM	SiCl4 pre valve closed
1/3/2013	4:25:15 PM	SiCl4 post valve closed
1/3/2013	4:25:15 PM	Bypass valve closed
1/3/2013	4:25:15 PM	Bubbler valve closed
1/3/2013	4:25:15 PM	Main Vac valve opened
1/3/2013	4:25:15 PM	Helium MFC set to  0.000000
1/3/2013	4:25:15 PM	H2 MFC set to  0.000000
1/3/2013	4:25:15 PM	BCl3 MFC set to  0.000000
1/3/2013	4:25:15 PM	PH3 MFC set to  0.000000
1/3/2013	4:25:15 PM	SiCl4 MFC set to  0.000000
1/3/2013	4:25:15 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	4:25:15 PM	Tube furnace set to 150
1/3/2013	4:25:16 PM	Run finished at 4:25 PM
1/3/2013	5:41:20 PM	Main Vac valve closed
1/3/2013	5:41:29 PM	Main Vac valve opened
1/3/2013	5:41:41 PM	Recipe started at 5:41 PM
1/3/2013	5:41:41 PM	Helium valve closed
1/3/2013	5:41:41 PM	H2 valve closed
1/3/2013	5:41:41 PM	BCl3 valve closed
1/3/2013	5:41:41 PM	PH3 valve closed
1/3/2013	5:41:41 PM	SiCl4 pre valve closed
1/3/2013	5:41:41 PM	SiCl4 post valve closed
1/3/2013	5:41:41 PM	Main Vac valve closed
1/3/2013	5:41:41 PM	Bypass valve closed
1/3/2013	5:41:41 PM	Bubbler valve closed
1/3/2013	5:41:41 PM	Helium MFC set to  0.000000
1/3/2013	5:41:41 PM	H2 MFC set to  0.000000
1/3/2013	5:41:41 PM	BCl3 MFC set to  0.000000
1/3/2013	5:41:41 PM	PH3 MFC set to  0.000000
1/3/2013	5:41:41 PM	SiCl4 MFC set to  0.000000
1/3/2013	5:41:41 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	5:41:41 PM	Tube furnace set to 0
1/3/2013	5:41:44 PM	Helium valve closed
1/3/2013	5:41:44 PM	BCl3 valve closed
1/3/2013	5:41:44 PM	PH3 valve closed
1/3/2013	5:41:44 PM	SiCl4 pre valve closed
1/3/2013	5:41:44 PM	SiCl4 post valve closed
1/3/2013	5:41:44 PM	Main Vac valve closed
1/3/2013	5:41:44 PM	Bypass valve closed
1/3/2013	5:41:44 PM	Bubbler valve closed
1/3/2013	5:41:44 PM	H2 valve opened
1/3/2013	5:41:44 PM	Helium MFC set to  0.000000
1/3/2013	5:41:44 PM	H2 MFC set to  500.000000
1/3/2013	5:41:44 PM	BCl3 MFC set to  0.000000
1/3/2013	5:41:44 PM	PH3 MFC set to  0.000000
1/3/2013	5:41:44 PM	SiCl4 MFC set to  0.000000
1/3/2013	5:41:44 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	5:41:45 PM	Tube furnace set to 0
1/3/2013	5:42:57 PM	Helium valve closed
1/3/2013	5:42:57 PM	BCl3 valve closed
1/3/2013	5:42:57 PM	PH3 valve closed
1/3/2013	5:42:57 PM	SiCl4 pre valve closed
1/3/2013	5:42:57 PM	SiCl4 post valve closed
1/3/2013	5:42:57 PM	Main Vac valve closed
1/3/2013	5:42:57 PM	Bypass valve closed
1/3/2013	5:42:57 PM	H2 valve opened
1/3/2013	5:42:57 PM	Bubbler valve opened
1/3/2013	5:42:57 PM	Helium MFC set to  0.000000
1/3/2013	5:42:57 PM	H2 MFC set to  500.000000
1/3/2013	5:42:57 PM	BCl3 MFC set to  0.000000
1/3/2013	5:42:57 PM	PH3 MFC set to  0.000000
1/3/2013	5:42:57 PM	SiCl4 MFC set to  0.000000
1/3/2013	5:42:57 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	5:42:57 PM	Tube furnace set to 0
1/3/2013	5:42:58 PM	Helium valve closed
1/3/2013	5:42:58 PM	BCl3 valve closed
1/3/2013	5:42:58 PM	PH3 valve closed
1/3/2013	5:42:58 PM	SiCl4 pre valve closed
1/3/2013	5:42:58 PM	SiCl4 post valve closed
1/3/2013	5:42:58 PM	Main Vac valve closed
1/3/2013	5:42:58 PM	Bypass valve closed
1/3/2013	5:42:58 PM	H2 valve opened
1/3/2013	5:42:58 PM	Bubbler valve opened
1/3/2013	5:42:58 PM	Helium MFC set to  0.000000
1/3/2013	5:42:58 PM	H2 MFC set to  500.000000
1/3/2013	5:42:58 PM	BCl3 MFC set to  0.000000
1/3/2013	5:42:58 PM	PH3 MFC set to  0.000000
1/3/2013	5:42:58 PM	SiCl4 MFC set to  0.000000
1/3/2013	5:42:58 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	5:42:58 PM	Tube furnace set to 1000
1/3/2013	6:02:58 PM	Helium valve closed
1/3/2013	6:02:58 PM	PH3 valve closed
1/3/2013	6:02:58 PM	Main Vac valve closed
1/3/2013	6:02:58 PM	Bypass valve closed
1/3/2013	6:02:58 PM	H2 valve opened
1/3/2013	6:02:58 PM	BCl3 valve opened
1/3/2013	6:02:58 PM	SiCl4 pre valve opened
1/3/2013	6:02:58 PM	SiCl4 post valve opened
1/3/2013	6:02:58 PM	Bubbler valve opened
1/3/2013	6:02:58 PM	Helium MFC set to  0.000000
1/3/2013	6:02:58 PM	H2 MFC set to  450.000000
1/3/2013	6:02:58 PM	BCl3 MFC set to  1.500000
1/3/2013	6:02:58 PM	PH3 MFC set to  0.000000
1/3/2013	6:02:58 PM	SiCl4 MFC set to  50.000000
1/3/2013	6:02:58 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	6:02:59 PM	Tube furnace set to 1000
1/3/2013	6:22:59 PM	Helium valve closed
1/3/2013	6:22:59 PM	BCl3 valve closed
1/3/2013	6:22:59 PM	Main Vac valve closed
1/3/2013	6:22:59 PM	Bypass valve closed
1/3/2013	6:22:59 PM	H2 valve opened
1/3/2013	6:22:59 PM	PH3 valve opened
1/3/2013	6:22:59 PM	SiCl4 pre valve opened
1/3/2013	6:22:59 PM	SiCl4 post valve opened
1/3/2013	6:22:59 PM	Bubbler valve opened
1/3/2013	6:22:59 PM	Helium MFC set to  0.000000
1/3/2013	6:22:59 PM	H2 MFC set to  450.000000
1/3/2013	6:22:59 PM	BCl3 MFC set to  0.000000
1/3/2013	6:22:59 PM	PH3 MFC set to  20.000000
1/3/2013	6:22:59 PM	SiCl4 MFC set to  50.000000
1/3/2013	6:22:59 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	6:22:59 PM	Tube furnace set to 1000
1/3/2013	6:27:59 PM	Helium valve closed
1/3/2013	6:27:59 PM	BCl3 valve closed
1/3/2013	6:27:59 PM	PH3 valve closed
1/3/2013	6:27:59 PM	SiCl4 pre valve closed
1/3/2013	6:27:59 PM	SiCl4 post valve closed
1/3/2013	6:27:59 PM	Main Vac valve closed
1/3/2013	6:27:59 PM	Bypass valve closed
1/3/2013	6:27:59 PM	H2 valve opened
1/3/2013	6:27:59 PM	Bubbler valve opened
1/3/2013	6:27:59 PM	Helium MFC set to  0.000000
1/3/2013	6:27:59 PM	H2 MFC set to  500.000000
1/3/2013	6:27:59 PM	BCl3 MFC set to  0.000000
1/3/2013	6:27:59 PM	PH3 MFC set to  0.000000
1/3/2013	6:27:59 PM	SiCl4 MFC set to  0.000000
1/3/2013	6:27:59 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	6:27:59 PM	Tube furnace set to 950
1/3/2013	6:30:59 PM	Helium valve closed
1/3/2013	6:30:59 PM	BCl3 valve closed
1/3/2013	6:30:59 PM	PH3 valve closed
1/3/2013	6:30:59 PM	SiCl4 pre valve closed
1/3/2013	6:30:59 PM	SiCl4 post valve closed
1/3/2013	6:30:59 PM	Main Vac valve closed
1/3/2013	6:30:59 PM	Bypass valve closed
1/3/2013	6:30:59 PM	H2 valve opened
1/3/2013	6:30:59 PM	Bubbler valve opened
1/3/2013	6:30:59 PM	Helium MFC set to  0.000000
1/3/2013	6:30:59 PM	H2 MFC set to  500.000000
1/3/2013	6:30:59 PM	BCl3 MFC set to  0.000000
1/3/2013	6:30:59 PM	PH3 MFC set to  0.000000
1/3/2013	6:30:59 PM	SiCl4 MFC set to  0.000000
1/3/2013	6:30:59 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	6:30:59 PM	Tube furnace set to 900
1/3/2013	6:33:59 PM	Helium valve closed
1/3/2013	6:33:59 PM	BCl3 valve closed
1/3/2013	6:33:59 PM	PH3 valve closed
1/3/2013	6:33:59 PM	SiCl4 pre valve closed
1/3/2013	6:33:59 PM	SiCl4 post valve closed
1/3/2013	6:33:59 PM	Main Vac valve closed
1/3/2013	6:33:59 PM	Bypass valve closed
1/3/2013	6:33:59 PM	H2 valve opened
1/3/2013	6:33:59 PM	Bubbler valve opened
1/3/2013	6:33:59 PM	Helium MFC set to  0.000000
1/3/2013	6:33:59 PM	H2 MFC set to  500.000000
1/3/2013	6:33:59 PM	BCl3 MFC set to  0.000000
1/3/2013	6:33:59 PM	PH3 MFC set to  0.000000
1/3/2013	6:33:59 PM	SiCl4 MFC set to  0.000000
1/3/2013	6:33:59 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	6:34:00 PM	Tube furnace set to 850
1/3/2013	6:37:00 PM	Helium valve closed
1/3/2013	6:37:00 PM	BCl3 valve closed
1/3/2013	6:37:00 PM	PH3 valve closed
1/3/2013	6:37:00 PM	SiCl4 pre valve closed
1/3/2013	6:37:00 PM	SiCl4 post valve closed
1/3/2013	6:37:00 PM	Main Vac valve closed
1/3/2013	6:37:00 PM	Bypass valve closed
1/3/2013	6:37:00 PM	H2 valve opened
1/3/2013	6:37:00 PM	Bubbler valve opened
1/3/2013	6:37:00 PM	Helium MFC set to  0.000000
1/3/2013	6:37:00 PM	H2 MFC set to  500.000000
1/3/2013	6:37:00 PM	BCl3 MFC set to  0.000000
1/3/2013	6:37:00 PM	PH3 MFC set to  0.000000
1/3/2013	6:37:00 PM	SiCl4 MFC set to  0.000000
1/3/2013	6:37:00 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	6:37:00 PM	Tube furnace set to 800
1/3/2013	6:40:00 PM	Helium valve closed
1/3/2013	6:40:00 PM	BCl3 valve closed
1/3/2013	6:40:00 PM	PH3 valve closed
1/3/2013	6:40:00 PM	SiCl4 pre valve closed
1/3/2013	6:40:00 PM	SiCl4 post valve closed
1/3/2013	6:40:00 PM	Main Vac valve closed
1/3/2013	6:40:00 PM	Bypass valve closed
1/3/2013	6:40:00 PM	H2 valve opened
1/3/2013	6:40:00 PM	Bubbler valve opened
1/3/2013	6:40:00 PM	Helium MFC set to  0.000000
1/3/2013	6:40:00 PM	H2 MFC set to  500.000000
1/3/2013	6:40:00 PM	BCl3 MFC set to  0.000000
1/3/2013	6:40:00 PM	PH3 MFC set to  0.000000
1/3/2013	6:40:00 PM	SiCl4 MFC set to  0.000000
1/3/2013	6:40:00 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	6:40:00 PM	Tube furnace set to 750
1/3/2013	6:43:00 PM	H2 valve closed
1/3/2013	6:43:00 PM	BCl3 valve closed
1/3/2013	6:43:00 PM	PH3 valve closed
1/3/2013	6:43:00 PM	SiCl4 pre valve closed
1/3/2013	6:43:00 PM	SiCl4 post valve closed
1/3/2013	6:43:00 PM	Main Vac valve closed
1/3/2013	6:43:00 PM	Bypass valve closed
1/3/2013	6:43:00 PM	Helium valve opened
1/3/2013	6:43:00 PM	Bubbler valve opened
1/3/2013	6:43:00 PM	Helium MFC set to  500.000000
1/3/2013	6:43:00 PM	H2 MFC set to  0.000000
1/3/2013	6:43:00 PM	BCl3 MFC set to  0.000000
1/3/2013	6:43:00 PM	PH3 MFC set to  0.000000
1/3/2013	6:43:00 PM	SiCl4 MFC set to  0.000000
1/3/2013	6:43:00 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	6:43:00 PM	Tube furnace set to 0
1/3/2013	7:03:00 PM	Helium valve closed
1/3/2013	7:03:00 PM	H2 valve closed
1/3/2013	7:03:00 PM	BCl3 valve closed
1/3/2013	7:03:00 PM	PH3 valve closed
1/3/2013	7:03:00 PM	SiCl4 pre valve closed
1/3/2013	7:03:00 PM	SiCl4 post valve closed
1/3/2013	7:03:00 PM	Main Vac valve closed
1/3/2013	7:03:00 PM	Bypass valve closed
1/3/2013	7:03:00 PM	Bubbler valve closed
1/3/2013	7:03:00 PM	Helium MFC set to  0.000000
1/3/2013	7:03:00 PM	H2 MFC set to  0.000000
1/3/2013	7:03:00 PM	BCl3 MFC set to  0.000000
1/3/2013	7:03:00 PM	PH3 MFC set to  0.000000
1/3/2013	7:03:00 PM	SiCl4 MFC set to  0.000000
1/3/2013	7:03:00 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	7:03:00 PM	Tube furnace set to 0
1/3/2013	7:33:00 PM	Helium valve closed
1/3/2013	7:33:00 PM	H2 valve closed
1/3/2013	7:33:00 PM	BCl3 valve closed
1/3/2013	7:33:00 PM	PH3 valve closed
1/3/2013	7:33:00 PM	SiCl4 pre valve closed
1/3/2013	7:33:00 PM	SiCl4 post valve closed
1/3/2013	7:33:00 PM	Main Vac valve closed
1/3/2013	7:33:00 PM	Bubbler valve closed
1/3/2013	7:33:00 PM	Bypass valve opened
1/3/2013	7:33:00 PM	Helium MFC set to  0.000000
1/3/2013	7:33:00 PM	H2 MFC set to  0.000000
1/3/2013	7:33:00 PM	BCl3 MFC set to  0.000000
1/3/2013	7:33:00 PM	PH3 MFC set to  0.000000
1/3/2013	7:33:00 PM	SiCl4 MFC set to  0.000000
1/3/2013	7:33:00 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	7:33:01 PM	Tube furnace set to 0
1/3/2013	7:34:01 PM	Helium valve closed
1/3/2013	7:34:01 PM	H2 valve closed
1/3/2013	7:34:01 PM	BCl3 valve closed
1/3/2013	7:34:01 PM	PH3 valve closed
1/3/2013	7:34:01 PM	SiCl4 pre valve closed
1/3/2013	7:34:01 PM	SiCl4 post valve closed
1/3/2013	7:34:01 PM	Main Vac valve closed
1/3/2013	7:34:01 PM	Bubbler valve closed
1/3/2013	7:34:01 PM	Bypass valve opened
1/3/2013	7:34:01 PM	Helium MFC set to  0.000000
1/3/2013	7:34:01 PM	H2 MFC set to  0.000000
1/3/2013	7:34:01 PM	BCl3 MFC set to  0.000000
1/3/2013	7:34:01 PM	PH3 MFC set to  0.000000
1/3/2013	7:34:01 PM	SiCl4 MFC set to  0.000000
1/3/2013	7:34:01 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	7:34:02 PM	Tube furnace set to 0
1/3/2013	7:35:02 PM	Helium valve closed
1/3/2013	7:35:02 PM	H2 valve closed
1/3/2013	7:35:02 PM	BCl3 valve closed
1/3/2013	7:35:02 PM	PH3 valve closed
1/3/2013	7:35:02 PM	SiCl4 pre valve closed
1/3/2013	7:35:02 PM	SiCl4 post valve closed
1/3/2013	7:35:02 PM	Bypass valve closed
1/3/2013	7:35:02 PM	Bubbler valve closed
1/3/2013	7:35:02 PM	Main Vac valve opened
1/3/2013	7:35:02 PM	Helium MFC set to  0.000000
1/3/2013	7:35:02 PM	H2 MFC set to  0.000000
1/3/2013	7:35:02 PM	BCl3 MFC set to  0.000000
1/3/2013	7:35:02 PM	PH3 MFC set to  0.000000
1/3/2013	7:35:02 PM	SiCl4 MFC set to  0.000000
1/3/2013	7:35:02 PM	Bypass solenoid MFC set to  0.000000
1/3/2013	7:35:02 PM	Tube furnace set to 0
1/3/2013	7:35:03 PM	Run finished at 7:35 PM
